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Load Lock Chamber with removable door

Product code: KS100(RD)

The KS100(RD) is designed for the fast and clean introduction of samples into an UHV system.
Samples are loaded through a removable O-ring sealed door, usually onto a MD16 magnetically driven linear-rotary feedthrough.

A total of five CF ports is provided:

  • Mounting flange DN100CF fixed
  • Pumping port DN40CF rotateable, tapped M6
  • Vacuum gauge port DN40CF rotateable, tapped M6
  • Viewport flange DN40CF fixed, tapped M6
  • Transporter port DN16CF fixed, tapped M4

 

Order code:
  • KS100(RD) load lock chamber
customized versions:
  • flange positions and number of ports can be altered on request.


On request, the KS100(RD) can be supplied with a DN40CF gate valve, ion gauge,
view port, turbo molecular pump and MD16 linear-/rotary feedthrough.

 

Specifications: Load Lock Chamber with removable door

  • bakeout temperature: 150°C max.
  • He leak rate < 1x10-9 mbar*l/s
  • Body and flanges St 1.4301 (AISI 304L)

Downloads: drawing (pdf)

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