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Fast Entry Load Lock

Product code: KS63-MD16-TSMD-XXXX-YYYY

The KS63 is designed for the fast and clean introduction of samples, STM tips or crucibles into a UHV system. Samples are loaded through a O-Ring sealed door at the rear end of the load lock onto a MD16 magnetically coupled linear-rotary feedthrough.
A total of four CF ports is provided:

  • Mounting flange DN63CF fixed
  • Pumping port DN40CF rotateable, tapped M6
  • Vacuum gauge port DN40CF rotateable, tapped M6
  • Viewport flange DN40CF fixed, tapped M6
Order code customized version:
  • KS63-MD16-XXX-YYY

XXX: linear travel in millimeters (min. 250mm)
YYY: retracted length, flange face of CF16 to end of shaft in millimeters (min. 15mm)

On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump.

Specifications: Fast Entry Load Lock

MD16 linear travel X >= 10mm AND <= 500mm
MD16 retracted length Y >= 12.3mm AND <= 250mm; standard 30mm

  • linear travel: customized
  • retracted shaft lenght: customized
  • rotation: continuous
  • torque: 0.5 Nm
  • linear force: 30N
  • bakeout temperature: 150°C
  • He leak rate: < 1x10-9 mbar
  • fully UHV compatible materials: body and flanges St 1.4301 (AISI 304L)

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