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Hexapod Port Aligner DN63CF for angular and lateral displacement

Product code: PA63HEX

Hexapod geometry for full degree of freedom:

  • lateral axis displacement
  • length adjustment
  • angular adjustment

This port aligner has six alignment screws instead of the usual three. Left/right threaded hexnuts allow for angular, linear and lateral (off axis) adjustment. The alignment screws are equipped with pivot mounts on both ends. The hexagonal geometry adds additional sturdyness.

Application example: A sample transporter axis needs to be aligned to two points of sample interchange, i.e. a given point of interchange in a chamber A must be aligned with a specific point of interchange in chamber B.

A great specific example of it's implementation is by Imagine Optic, who have made our PA63HEX a standard part of their HASO EUV wavefront sensors (pictured below):

Specifications: Hexapod Port Aligner DN63CF for angular and lateral displacement

adds 110.0 to dimension Y of the main product

  • flange 1: DN63CF (4.5" OD), through holes
  • flange 2: DN63CF (4.5" OD), through holes
  • insertion length: 110mm
  • lateral deflection: +/-5mm
  • angular deflection: +/-5deg
  • free bore: 65mm
  • pressure range 1E-11mbar to 1000mbar
  • fully UHV compatible materials
  • max. bakeout temperature 200°C

download alignment manual
download drawing (PDF)
download 3D-model in STEP format (zipped)

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