Boomerax 4-Axis System (XYZR)

• Product Configurations

  There are many different standard solutions available:

  Product Code	Base Flange	Travel Flange	XY Travel	Z Travel	Max. Insert OD	XY Free Bore	Z Free Bore	Rotation Included
  MXYZCF40TCF40-0010-ZZZZ	CF40T	CF40	10 mm	Min. 100mm/ Max. 500mm	9.5 mm	38 mm	38 mm	No*
  MXYZCF63TCF40-0012-ZZZZ	CF63T	CF40	12.5 mm	Min. 100mm/ Max. 500mm	29.5 mm	65 mm	38 mm	No*
  MXYZCF63TCF63-0012-ZZZZ	CF63T	CF63	12.5 mm	Min. 100mm/ Max. 1000mm	29.5 mm	65 mm	65 mm	No*
  MXYZCF100TCF63-0012-ZZZZ	CF100T	CF63	12.5 mm	Min. 100mm/ Max. 1000mm	64 mm	102 mm	65 mm	No*
  MXYZCF100TCF63-0025-ZZZZ	CF100T	CF63	25 mm	Min. 100mm/ Max. 1000mm	29 mm	102 mm	65 mm	No*

  *Can be paired with a Ferrovac Boomerax Insert Assembly or a rotary feedthrough to enable rotation.

  These are our standard configurations.
  If you need a custom set-up beyond these specifications, connect with Ferrovac Sales for expert advice.

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• Description

  Consisting of a Boomerax XY-Stage and a Boomerax Z-Stage, these fully configured multiaxis manipulators are capable of linear travel in all thre axis at very high precision, even when manually driven. Combined with a Differentially pumped rotary feedthrough, or a precision scale rotary feedthrough, a rotating insert component can be added, enabling partial or continuous rotation along the Z-axis.

  Usually such a set-up is also paired with a small feedthrough chamber for electrical or cryogenic access to the insert head.
  Ferrovac provides various complete insert solutions that are specifically engineered as a perfect fit for the Boomerax multiaxis manipulator.

  Connect with our Ferrovac experts for advice in regards to such an insert assembly, or any other questions you might have.

• Specifications

  General

  • Bakeout Temperature: 150°C max.
  • Pressure Range: 1E-11 to 1000 mbar
  • Helium Leak Rate: <1E-10 mbar*l/s
  • Air-Side Lubrication
    • Spindle: Motorex Type 3000
    • Screws: CRC Dry Lube F 32602-AA
    • Linear Rails: Krytox GPL 225

  XY-Stage

  • Resolution: 2 microns (manual). Higher resolutions achievable with motorized and encoded versions.
  • Adjustable Tilt: ±2°
  • Adjustable Mechanical End Stops:Yes
  • XY Travel Range: Depends on Product Configuration

  Z-Stage

  • Resolution: 2 microns (manual). Higher resolutions achievable with motorized and encoded versions.
  • Transmission: 1:2
  • Helical/Screw Gear Unit: 1:1
  • Spindle Pitch: 2 mm
  • Z Travel Range: Customizable (min 100mm, max 1000 mm)

  Note: The MXYZ requires airside support with a stand when mounted horizontally.

Downloads

Downloads