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Wafer Lifting Device

Product code: FRKLIFT

A typical application In the semiconductor industry is the handling of wafers. The wafer lift is an accessory which can be used with all magnetically driven dual shaft sample transporters. It allows for movement perpendicular to the transfer axis. The up/down movement is done with approximately half-turn in each direction of the outer magnet assembly of the sample transporter. Please contact us for a discussion about a customized interface for your specific wafer support.

RMD40 with FRKLIFT option


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Application example

 


Specifications: Wafer Lifting Device

adds 2.0 to dimension Y of the main product

  • bakeout temperature: 200 °C max.
  • fully UHV compatible materials
  • lift travel: +/- 7.5mm
  • compatible with dual shaft sample transporters
  • bespoken holder for different sizes of wafers
    Download datasheet
    Download drawing

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