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Chamber for Electrical Feedthroughs of BOOMERAX Manipulators

Product code: MZFCHCF63TCF63T5XCF16T

An XYZ bellows sealed like our BOOMERAX configurations usually requires a chamber for electrical feedthroughs installed on the travelling flange of the Z-module. This compact version allows for mounting of a maximum of five DN16CF feedthroughs.

Threaded ring segments are provided for easy mounting of a manipulator support tube.


Specifications: Chamber for Electrical Feedthroughs of BOOMERAX Manipulators

  • base flange DN63CF tapped M8 with threaded ring segments for mounting support tube
  • top flange DN63CF tapped M8
  • 5x DN16CF tapped M4 for electrical feedthroughs
  • material stainless steel 304L
  • cleaned to UHV standards
  • He leak rate < 1E-10mbar*l/s
  • bakeable to 250°C
     

Download CAD File

Technical Drawing Page 1
Technical Drawing Page 2

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