List price:

5'184.00 CHF

4'685.89 EUR *
5'543.79 USD *

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms 2010), excl. packing.
This price list replaces all previously published lists.
Prices are subject to change without notice.

Minimum order value: 150.00 CHF.

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 1.1063 CHF
1 CHF = 0.9039 EUR
1 USD = 0.9351 CHF
1 CHF = 1.0694 USD

Magnetically driven dual shaft wobblestick manipulator with mounting flange DN40CF.
For rotary motion between the two invacuum shafts.

Order code standard length:

100mm travel: WMG40(RT)-100-63
150mm travel: WMG40(RT)-150-63
200mm travel: WMG40(RT)-200-63
250mm travel: WMG40(RT)-250-63
300mm travel: WMG40(RT)-300-63

Order code customized version:

WMG40(RT)-XXXX-YYYY

XXXX: linear travel in millimeters (min. 50mm)
YYYY: retracted length, flange face to end of shaft in millimeters (min. 63mm)

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Dual Shaft WS with Independent Rotation of the Inner Shaft, DN40CF

Product code: WMG40(RT)-XXXX-YYYY

Magnetically driven dual shaft wobblestick manipulator with mounting flange DN40CF.
For rotary motion between the two invacuum shafts.

Specifications: Dual Shaft WS with Independent Rotation of the Inner Shaft, DN40CF

linear travel X >= 50mm AND <= 700mm
retracted length Y >= 63mm AND <= 205mm; standard 63mm

Dual Shaft Wobblestick DN40CF

linear travel: 100mm, 150mm, 200mm, 250mm, 300mm or customized length
angular deflection +/-20 degrees (see note 1)
linear force: 23N
torque: 0.4Nm
bakeout temperature: 200 °C max.
pressure range 1E-11mbar to 1000mbar
fully UHV compatible materials

note 1: if mounted to wobblestick flange download drawing in pdf format

Options

The following is a list of compatible options for WMG40(RT) Dual Shaft WS with Independent Rotation of the Inner Shaft, DN40CF.

List price:

on request

High Force Pincer for Wafer Handling

Product code: PGHFWMWAF

For direct gripping of 2"... 6" wafers, this pincer design offers increased gripping force. To protect the wafer and for a secure grip, the jaws are equipped with FKM-O-rings.