Sign in

NEXTorr® Z100 NEG - ION combination pump 150l/s H2

Product code: PUSAESNEXTorr®Z100

The NEXTorr® Z 100 is a compact Ultra High Vacuum pump that efficiently integrates a sputter ion pump (SIP) and a Non Evaporable Getter (NEG) pump into a vacuum solution featuring high pumping speeds and capacities with a low weight and small footprint. The NEG element of the NEXTorr Z 100 is based on the SAES® high performance ZAO® sintered porous getter disks, stacked in an optimized gas trapping structure, and featuring pumping speed in excess of 150 l/s (H2). The ZAO getter material provides a superior H2 pumping performance relative to the St 172. The NEG cartridge is integrated onto a CF 35 flange containing a heater for the getter activation (500 °C x 1h). Once activated, the NEG will operate at room temperature without the use of power.

The opposite side of the same flange hosts a diode ion pump featuring 6 l/s for Ar and 15 l/s for CH4. Gas flows from the vacuum system to the ion pump through a path optimized for conductance. The design of the pump provides additional pumping synergies: gases eventually released by the ion pump during operation are intercepted and removed by the NEG element, thus minimizing back-streaming effects; even fine Titanium particles, known to be potentially emitted by ion pumps, are effectively trapped by the NEG, reducing the risk of contamination of the vacuum system.

Specifications: NEXTorr® Z100 NEG - ION combination pump 150l/s H2

  • Total pump weight (magnets included): 2.2 kg
  • Flange: DN 35CF
  • Total pump volume: 0.5 litre
  • Type of ion pump: Diode
  • Operation Voltage Ion Element: 5.0 kVdc
  • Operation Voltage NEG Element: 9 Vdc
  • Getter Surface: 156 cm2

Downloads: datasheet SAES NEXTorr® Z100

 

Ferrovac AG | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | link? | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
© Ferrovac AG 2025 | © vogy GmbH 2025