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Boomerax Z Stage DN65, 300mm travel

Product code: MZ63CF63CF63-0300

The Boomerax MZ63 Z-drives offer a sturdy yet compact construction for accurate linear motion while their highest quality edge welded bellows fulfil the strictest requirements in terms of leak tightness and durability.
Short as well as long versions of the MZ63 have a continuous free bore, as the supports of their bellows are mounted externally.
Boomerax Z-drives are commonly combined with our Boomerax XY-Manipulators and differentially pumped rotary platforms to form a complete XYZR manipulator.


Specifications: Boomerax Z Stage DN65, 300mm travel

adds 449.3mm to dimension Y of the main product

  • Z travel: 300mm
  • continuous inner free bore, ID: 65mm
  • resolution: 5 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
    • transmission: 1:2
      • helical/screw gear Unit: 2:1
      • spindle Pitch: 4mm
  • mounting flange: DN63CF with through holes for M8 (other flanges on request)
  • travelling flange: DN63CF with through holes for M8 (other flanges on request)
  • bakeout temperature: 200 °C max.
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s

Note: MZ63 must be supported with a stand if mounted horizontally
download setup example drawing (pdf)

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