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Boomerax Z Stage DN65, 200mm travel

Product code: MZ63CF63CF63-0200

The Boomerax MZ63 Z-drives offer a sturdy yet compact construction for accurate linear motion while their highest quality edge welded bellows fulfil the strictest requirements in terms of leak tightness and durability.
Short as well as long versions of the MZ63 have a continuous free bore, as the supports of their bellows are mounted externally.
Boomerax Z-drives are commonly combined with our Boomerax XY-Manipulators and differentially pumped rotary platforms to form a complete XYZR manipulator.


Specifications: Boomerax Z Stage DN65, 200mm travel

  • Z travel: 200mm
  • free bore: 65mm
  • resolution: 5 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
  • transmission: 1:2
  • spindle Pitch: 4mm
  • mounting flange: DN63CF (4.5" OD) with through holes (other flanges on request)
  • travelling flange: DN63CF (4.5"OD) with through holes (other flanges on request)
  • bakeout temperature: 200 °C max.
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s

Downloads: manuals 

Note: MZ63 must be supported with a stand if mounted horizontally
setup example drawing (pdf)


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