List price:

19'316.32 CHF

19'878.69 EUR *
21'564.41 USD *

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.97171 CHF
1 CHF = 1.0291 EUR
1 USD = 0.89575 CHF
1 CHF = 1.1164 USD

Basic Boomerax XYZ high precision bellows sealed manipulator configuration with manual, large OD micrometers. Base flange DN100CF (6" OD) tapped, travelling flange DN63CF (4.5" OD).

Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator, Stages, XYZ-Axis, X-Axis, Y-Axis, XY-Axis, XY-Stages, XY-Stage, XY-Bewegung, Linearhub, Linearer Verschiebungsmechanismus, Boomerax, MXY, UHV, Manipulator

XYZ Boomerax Manipulator XY travel=+-12.5mm, Z travel=100mm

Product code: MXYZCF100TCF63-0012-0100

This Boomerax XYZR translation stage combines X, Y and Z translation in a compact assembly of rigid, backlash-free and optimally matched components. Alingment studs on the base plate allow for a +/-2° tilt of the Z-axis.

It's large micrometer heads with vernier scale allow for a readout accuracy of 2 microns in X and Y and 5 microns in Z. All axes can be motorized and in combination with linear absolute encoders, resolutions down to the nanometer range can be achieved.

The XY travel range can be limited mechanically by adjustable end stops and/or by adding electrical limit switches.

With it's large free bore of 100mm of the XY-module and a free inner diameter of 65mm for the Z-module, this manipulator is ideally suited to accept inserts with a diameter of up to 63mm OD. Typical applications include the installation of a Helium flow cryostat or a variable temperature insert for in-situ sample preparation.

Inserts are mechanically supported by a slide bearing (guide ring) installed in the top flange of the XY-module.

Highest quality edge welded bellows fulfill the strictest requirements in terms of leak tightness and durability.
Our Boomerax Manipulators are available with various options and accessories.

Specifications: XYZ Boomerax Manipulator XY travel=+-12.5mm, Z travel=100mm

1x Boomerax XY Stage DN100 with +-12.5mm travel

Product code: MXY100CF100TCF63TXY12

XY travel: +-12.5mm
free bore: 102mm
resolution: 2 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
mounting flange: DN100CF (6" OD) tapped M8 (other flanges on request)
travelling flange: DN63CF (4.5" OD) tapped M8 (other flanges on request)
adjustable tilt: 2°
adjustable mechanical end stops
bakeout temperature: 150 °C max.
pressure range: 1E-11 to 1000 mbar
He leak rate: <1E-10 mbar*l/s

Downloads: drawing (pdf) / 3D-model (stp)

1x Boomerax Z Stage DN65, 100mm travel

Product code: MZ63CF63CF63-0100

Z travel: 100mm
continuous inner free bore, ID: 65mm
resolution: 5 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
- transmission: 1:2
  - helical/screw gear Unit: 2:1
  - spindle Pitch: 4mm
mounting flange: DN63CF with through holes for M8 (other flanges on request)
travelling flange: DN63CF with through holes for M8 (other flanges on request)
bakeout temperature: 200 °C max.
pressure range: 1E-11 to 1000 mbar
He leak rate: <1E-10 mbar*l/s

Downloads: manuals

Note: MZ63 must be supported with a stand if mounted horizontally
setup example drawing (pdf)

Possibly an end-user certificate (EUC) is required from purchaser.
Export licence from the State Secretariat for Economic Affairs (SECO) or Swiss Federal Office of Energy (SFOE) may be required