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Boomerax XY Stage DN100 with +-12.5mm travel

Product code: MXY100CF100TCF63TXY12

The Boomerax MXY100 module is a versatile, rigid and precise 2 axis positioning stage with a DN100 edge welded bellows. Standard versions use large diameter micrometer heads with 20 micron scale and a vernier, allowing for a reading of 2 microns. In combination with Boomerax Z  modules and rotary platforms, a complete, XYZR manipulator can be built.

Key features:

  • 2° adjustable tilt of both flanges
  • adjustable mechanical end stops
  • retrofittable motorisation
  • stepper motors
  • limit switches
  • encoders
  • load compensation springs

Specifications: Boomerax XY Stage DN100 with +-12.5mm travel

  • XY travel: +-12.5mm
  • free bore: 102mm
  • resolution: 2 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
  • mounting flange: DN100CF (6" OD) tapped M8 (other flanges on request)
  • travelling flange: DN63CF (4.5" OD) tapped M8 (other flanges on request)
  • adjustable tilt: 2°
  • adjustable mechanical end stops
  • bakeout temperature: 150 °C max.
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s
  • All vacuum-side components cleaned to UHV standards.
  • Air-side lubrication used on certain parts:
    • Spindle: Motorex Type 3000
    • Screws: CRC Dry Lube F 32602-AA
    • Linear rails: Krytox GPL 225

Downloads: drawing (pdf)  /  3D-model (stp)

Options and Accessories

List price:

757.39 CHF

814.75 EUR*
905.75 USD*

Stepper Motor Kit, NEM23 and max. 1.9Nm Torque

Product code: MOTN23T1.9

Motorization Kit for one axis of Boomerax-Series XYZ Manipulators. Stepper Motor 1.9Nm with 1.8° step resolution.


List price:

on request

Load compensation upgrade for Boomerax XY Stage NW100, one axis

Product code: UPGRADEMXY100(+MXYFS74)

Constant force spring with 74N load relief for one axis of Boomerax stage NW100.


List price:

on request

Linear Absolute Optical Encoder Kit for one Axis of XY-Translator CF100, 50mm Scale

Product code: UPGRADEMXY100(+MXENCLAK50)

Absolute, optical linear encoder with 78nm resolution. Stainless steel scale.


List price:

on request

Travel flange upgrade for MXY Boomerax from CF63T to CF100T

Product code: UPGRADEMXY(TRAVELCF100T)


List price:

on request

Base flange upgrade for MXY Boomerax from CF100T to CF160T

Product code: UPGRADEMXY(BASECF160T)


List price:

523.74 CHF

563.40 EUR*
626.33 USD*

DN100CF (6 inch OD) Through Hole Adapter, one flange rotatable

Product code: UPGRADEMXY100(+STCF100CF100RL70)

Straight DN100CF (6" OD) through hole adapter with one fixed and one rotatable flange for Boomerax XY Manipulators.

Insertion length = 70mm


List price:

664.53 CHF

714.86 EUR*
794.70 USD*

DN160CF (8 inch OD), DN100CF (6 inch OD) Through Hole Adapter, one flange rotatable

Product code: UPGRADEMXY100(+RNCF160CF100RL70)

Reducing DN160CF (8" OD) to DN100CF (6" OD) through hole adapter with one fixed and one rotatable flange for Boomerax XY Manipulators.

Insertion length = 70mm


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