List price:

on request

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.922795 CHF
1 CHF = 1.0837 EUR
1 USD = 0.794691 CHF
1 CHF = 1.2584 USD

Compact UHV Chamber for XYZ Manipulator Feedthrough Integration

This compact ultra-high vacuum (UHV) chamber is designed for the installation of feedthroughs on XYZ manipulators. It features a DN63CF mounting flange with an integrated interface for the manipulator support tube and a DN63CF top flange for mounting additional equipment. The chamber includes five DN16CF side ports for electrical feedthroughs.

The base flange incorporates threaded ring segments for securing the support tube of the manipulator.

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chamber electrical, feedthroughs xdncf xdncf, MPCF63CF635XCF16

Multiport Chamber for Electrical Feedthroughs 2xDN63CF, 5xDN16CF

Product code: MPCF63CF635XCF16

Feedthrough Chamber for Multiaxis BOOMERAX Manipulators

Multiaxis BOOMERAX manipulators require a dedicated chamber for integrating electrical and media feedthroughs, mounted on the traveling flange of the Z-module. This specific version supports the installation of up to five DN16CF electrical feedthroughs.

Specifications: Multiport Chamber for Electrical Feedthroughs 2xDN63CF, 5xDN16CF

Technical Specifications – UHV Feedthrough Chamber

Base Flange: DN63CF with threaded ring segments for mounting the support tube
Top Flange: DN63CF
Feedthrough Ports:
- 5 × DN16CF at 90° (orthogonal orientation)
Material: Stainless steel 304L
Surface Finish: Cleaned to UHV standards
Leak Rate: Helium leak rate < 1 × 10⁻¹⁰ mbar·L/s
Bakeout Temperature: Up to 250 °C

Included Accessories:

Set of plate nuts for DN16CF flanges
Set of copper gaskets

Downloads:

3D-Model (stp)
Drawing (pdf)