List price:

on request

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.91354 CHF
1 CHF = 1.0946 EUR
1 USD = 0.78580 CHF
1 CHF = 1.2726 USD

Compact UHV Chamber for XYZ Manipulator Feedthrough Integration

This compact ultra-high vacuum (UHV) chamber is designed for the installation of feedthroughs on XYZ manipulators. It features a DN63CF mounting flange with an integrated interface for the manipulator support tube. The chamber includes five DN16CF ports inclined at 30° to the vertical axis.

The base flange incorporates threaded ring segments for securing the support tube of the manipulator. Depending on the specific setup, the chamber's top flange can accommodate either a magnetically coupled rotary feedthrough or, for example, a DN40CF Sub-D electrical feedthrough.

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Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 1xDN40CFT, 5xDN16CF at 30 Degrees Inclination

Product code: MPCF63CF40T5XCF1630DEG

Feedthrough Chamber for Multiaxis BOOMERAX Manipulators

Multiaxis BOOMERAX manipulators require a dedicated chamber for integrating electrical and media feedthroughs, mounted on the traveling flange of the Z-module. This specific version supports the installation of two DN16CF LN₂ feedthroughs and up to three DN16CF electrical feedthroughs. The top DN40CF port is typically used for mounting a magnetically coupled rotary feedthrough, enabling polar rotation (R1 axis).

Specifications: Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 1xDN40CFT, 5xDN16CF at 30 Degrees Inclination

Technical Specifications – UHV Feedthrough Chamber

Base Flange: DN63CF with threaded ring segments for mounting the support tube
Top Flange: DN40CF, tapped M6
Feedthrough Ports:
- 5 × DN16CF at 30° inclination
Material: Stainless steel 304L
Surface Finish: Cleaned to UHV standards
Leak Rate: Helium leak rate < 1 × 10⁻¹⁰ mbar·L/s
Bakeout Temperature: Up to 250 °C

Downloads:

3D-Model (stp)
Drawing (pdf)

Included Accessories:

Set of plate nuts for DN16CF flanges
Set of copper gaskets