List price:

on request

Terms of sale and delivery:

Prices listed are EXW Zurich (Incoterms® 2020).
Prices are subject to change without notice.

Minimum order value: 600.00 CHF
(excl. taxes/packaging/shipping costs).

Pricing is in CHF.

Prices marked with an asterisk (*) in EUR & USD are for reference only.

Exchange rates:
1 EUR = 0.91354 CHF
1 CHF = 1.0946 EUR
1 USD = 0.78580 CHF
1 CHF = 1.2726 USD

Compact UHV Chamber for XYZ Manipulator Feedthrough Integration

This compact ultra-high vacuum (UHV) chamber is designed for the installation of feedthroughs on XYZ manipulators. It features a DN63CF mounting flange with an integrated interface for the manipulator support tube. The chamber includes five DN16CF ports inclined at 30° to the vertical axis, along with two additional DN16CF ports arranged orthogonally.

The base flange incorporates threaded ring segments for securing the support tube of the manipulator. Depending on the specific setup, the chamber's top flange can accommodate either a magnetically coupled rotary feedthrough or, for example, a DN40CF Sub-D electrical feedthrough.

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Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 1xDN40CFT, 2xDN16CF, 3xDN16CF at 30deg

Product code: MPCF63CF40T2XCF165XCF1630DEG

Feedthrough Chamber for Multiaxis BOOMERAX Manipulators

Multiaxis BOOMERAX manipulators require a dedicated chamber for integrating electrical and media feedthroughs, mounted on the traveling flange of the Z-module. This specific version supports the installation of two DN16CF LN₂ feedthroughs and up to five DN16CF electrical feedthroughs. The top DN40CF port is typically used for mounting a magnetically coupled rotary feedthrough, enabling polar rotation (R1 axis).

Specifications: Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 1xDN40CFT, 2xDN16CF, 3xDN16CF at 30deg

Technical Specifications – UHV Feedthrough Chamber

Base Flange: DN63CF with threaded ring segments for mounting the support tube
Top Flange: DN40CF, tapped M6
Feedthrough Ports:
- 2 × DN16CF at 30° inclination for LN₂ feedthroughs
- 3 × DN16CF at 30° inclination for electrical feedthroughs
- 2 × DN16CF at 90° (orthogonal orientation)
Material: Stainless steel 304L
Surface Finish: Cleaned to UHV standards
Leak Rate: Helium leak rate < 1 × 10⁻¹⁰ mbar·L/s
Bakeout Temperature: Up to 250 °C

Included Accessories:

Set of plate nuts for DN16CF flanges
Set of copper gaskets

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