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Prices are subject to change without notice.

Minimum order value: 600.00 CHF
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Compact UHV Feedthrough-Chamber for XYZR Manipulators with LN2-cooling and R1 rotation

This compact ultra-high vacuum (UHV) chamber is designed for integrating feedthroughs on XYZR manipulators equipped with liquid nitrogen coling. This configuration is commonly used when combining polar rotation (R1) with LN2-cooling, enabling precise motion control under cryogenic conditions.

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Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 2xDN40CFT, 2xDN16CFT, 2xDN16CF at 30deg

Product code: MPCF632XCF40T2XCF16T2XCF1630DEG

Compact UHV Chamber for XYZR Manipulator Feedthrough Integration

This compact ultra-high vacuum (UHV) chamber is specifically designed to accommodate feedthroughs for XYZ manipulators with rotational (R) capability. It features a DN63CF mounting flange with an integrated interface for the manipulator’s support tube.

Two DN16CF ports, inclied at 30 degrees to the Z-Axis are dedicated to LN2 feedthroughs.

Two DN16CF and an additional DN40CF port, oriented orthogonally, enable the installation of electrical feedthroughs. The base flange includes threaded ring segments to securely mount the manipulator's support tube. The top flange usually supports the magnetically coupled rotary feedthrough.

Specifications: Multiport Chamber for Electrical Feedthroughs 1xDN63CF, 2xDN40CFT, 2xDN16CFT, 2xDN16CF at 30deg

Technical Specifications – UHV Feedthrough Chamber

Base Flange: DN63CF with threaded ring segments for mounting the support tube
Top Flange: DN40CF, tapped M6
Feedthrough Ports:
- 2 × DN16CF at 30° inclination for LN₂ feedthroughs
- 2 × DN16CF at 90° (orthogonal orientation)
- 1 × DN40CF at 90° (orthogonal orientation)
Material: Stainless steel 304L
Surface Finish: Cleaned to UHV standards
Leak Rate: Helium leak rate < 1 × 10⁻¹⁰ mbar·L/s
Bakeout Temperature: Up to 250 °C

Included Accessories:

Set of plate nuts for DN16CF flanges
Set of copper gaskets

Downloads:

3D-Model (stp)
Drawing (pdf)