Sign in

Wafer Lifting Device

Product code: FRKLIFT

A typical application In the semiconductor industry is the handling of wafers. The wafer lift is an accessory which can be used with all magnetically driven dual shaft sample transporters. It allows for movement perpendicular to the transfer axis. The up/down movement is done with approximately half-turn in each direction of the outer magnet assembly of the sample transporter. Please contact us for a discussion about a customized interface for your specific wafer support.

RMD40 with FRKLIFT option


Download drawing

 

Application example

 

Specifications: Wafer Lifting Device

adds 2.0 to dimension Y of the main product

  • bakeout temperature: 200 °C max.
  • fully UHV compatible materials
  • lift travel: +/- 7.5mm
  • compatible with dual shaft sample transporters
  • bespoken holder for different sizes of wafers
    Download datasheet
    Download drawing

Possibly an end-user certificate (EUC) is required from purchaser.
Export licence from the State Secretariat for Economic Affairs (SECO) or Swiss Federal Office of Energy (SFOE) may be required

Ferrovac AG | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | sales@ferrovac.com | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
© Ferrovac AG 2021 | © vogy GmbH 2021